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Industrial Automation

Semiconductor Overlay Metrology System

APPLICATION

Control over the main rotary axis of the machine. This system is used in the testing process to support the development and production of micro IC devices.

Requirements

  • Extreme accuracy & resolution Vs. size
  • Fast and easy integration
  • Low profile
  • Hollow shaft
  • Suitable for various temperatures
  • Cleanroom and/or vacuum environments
  • Performing in an electrically noisy environment

Rotary Encoder

  • Netzer DS-25 Absolute Position Electric Encoder™ incorporated on the load with a near-by frame-less motor and servo drive.
  • Compact, low profile, lightweight & wide bore: Allowing high level & easy integration for a low profile design.
  • Frame-less & contact-less with a negligible rotor weight: No operating mechanical parts results in a long-lasting operational time, and causes no extra weight & inertia (load) to the system.
  • Immune to magnetic interference: Can be very close to frame less-motor magnets.
  • High resolution 17-19 bit & accuracy < 0.010 deg for smooth and high accuracy rotation with high repeatability of 1 count.
  • Standard digital serial interfaces, SSi, BiSS.

Special safety algorithms with real-time BIT (Built In Test) over SSI or BiSS.

PRODUCT FEATURES

  • industrial high icon

    HIGH PRECISION

  • industrial low icon

    LOW PROFILE

  • industrial hollow icon

    HOLLOW SHAFT

  • industrial resistance icon

    IMMUNITY TO
    MAGNETIC FIELDS

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