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    Industrial Automation

    Semiconductor Overlay Metrology System

    CASE STUDY

    Control over the main rotary axis of the machine. This system is used in the testing process to support the development and production of micro IC devices.

    Requirements

    • Extreme accuracy & resolution Vs. size
    • Fast and easy integration
    • Low profile
    • Hollow shaft
    • Suitable for various temperatures
    • Cleanroom and/or vacuum environments
    • Performing in an electrically noisy environment

    Rotary Encoder

    • Netzer DS-25 Absolute Position Electric Encoder™ incorporated on the load with a near-by frame-less motor and servo drive.
    • Compact, low profile, lightweight & wide bore: Allowing high level & easy integration for a low profile design.
    • Frame-less & contact-less with a negligible rotor weight: No operating mechanical parts results in a long-lasting operational time, and causes no extra weight & inertia (load) to the system.
    • Immune to magnetic interference: Can be very close to frame less-motor magnets.
    • High resolution 17-19 bit & accuracy < 0.010 deg for smooth and high accuracy rotation with high repeatability of 1 count.
    • Standard digital serial interfaces, SSi, BiSS.

    Special safety algorithms with real-time BIT (Built In Test) over SSI or BiSS.

    PRODUCT FEATURES

    • industrial high icon

      HIGH PRECISION

    • industrial low icon

      LOW PROFILE

    • industrial hollow icon

      HOLLOW SHAFT

    • industrial resistance icon

      IMMUNITY TO
      MAGNETIC FIELDS

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