Embark on your next semiconductor breakthrough with Netzer’s VLS product line – engineered for precision, reliability, and affordability in wafer processing, lithography, metrology, and other cleanroom-critical applications. Designed to meet the stringent demands of semiconductor manufacturing, our VLS series transforms legacy products into advanced COTS solutions.
Featuring a contactless design, broad installation tolerance, and cleanroom-certified performance, the VLS series ensures high accuracy while optimizing Size, Weight, and Power (SWaP). These attributes aren’t just advantages – they’re essential for applications requiring minimal outgassing and ultra-high precision in vacuum environments (10⁻⁵ Torr). With a legacy of innovation and expertise, Netzer delivers the precision solutions that power next-generation semiconductor equipment.
High Precision (< 0.006° Accuracy)
Enables ultra-fine motion control essential for semiconductor fabrication and precision robotics.
Clean Room Performance
Low outgassing for contamination-sensitive applications, vacuum environments (10⁻⁵ Torr).
Parylene Conformal Coating
Enhances durability, minimizes tin whisker formation, and ensures ultra-low outgassing for cleanroom compliance.
Innovative Hollow Shaft Design
Enables seamless integration into precision automation and semiconductor processing equipment.
Ultra-Low Profile (< 7 mm)
Ideal for compact, high-density system designs requiring minimal space.
Extreme Temperature Durability
Advanced temperature drift compensation ensures stability in high-precision applications.
Rigorously Tested for Reliability
Subjected to shock, vibration, environmental stress screening (ESS), and optional thermal vacuum testing for mission-critical performance.
Extended Service Life (MTBF: 15 Years)
Engineered for long-term operation with minimal maintenance in cleanroom conditions.
* Extended optional
